Quorum MiniQS Sputter Coater

The Quorum MiniQS is a compact sputter coater in which metal atoms ejected from a magnetron target in a low-pressure argon plasma form a thin, continuous film on the specimen surface. With gold, gold-palladium and platinum targets, polymer, ceramic, biological and powder samples are rendered conductive before scanning electron microscopy (SEM), eliminating charging, improving secondary-electron yield and preserving image quality at high magnification. Film thickness is controlled through sputter current and time, and a rotating stage gives even coverage on complex geometries. Beyond SEM sample preparation, the coater is used in thin-film research to deposit metal electrode layers, to create conductive contacts for four-point-probe measurements and to study the relationship between coating thickness and sheet resistance. Its small footprint and short pump-down time support high sample throughput in a microscopy laboratory.